You are browsing the curriculum and teaching schedule of a past academic year (2024–2025).

Course unit, curriculum year 2024–2025

BBT.MND.704

Microfabrication, 5 cr

Tampere University

Description
Completion options

Teaching periods

Course code

BBT.MND.704

Language of learning

English, Finnish

Academic years

2024–2025, 2025–2026, 2026–2027

Level of study

Advanced studies

Grading scale

General scale, 0-5

Persons responsible

Responsible teacher:

Jari Väliaho

Responsible organisation

Faculty of Medicine and Health Technology 100 %

Coordinating organisation

MET Studies 100 %

Common learning outcomes

Innovation

Learning skills and critical thinking

Sustainable development goals

Goal 3: Good Health and Well-Being

Goal 9: Industry, Innovation and Infrastructure

Goal 12: Responsible Consumption and Production

Content

Core content

Clean room working principles

Lithography and resist working
Surface and bulk microfabrication processes
- Etching
- Deposition methods

Complementary knowledge

Wafer level working principles
- Defects and Yield
- Bonding
- Dicing
Basic characterization of fabricated samples

Specialist knowledge

Non contact lithography
Oxidation
Doping

Learning outcomes

Prerequisites

Compulsory prerequisites

Further information

Learning material

Equivalences

Studies that include this course

Completion option 1

Evaluation criteria: 0-5 grading based on laboratory work performance and lab report / learning diary and self evaluation

Participation in teaching

Online or distance self learning, Contact teaching

Online teaching (English)

26.08.2024 – 31.05.2025