Course unit, curriculum year 2026–2027
BBT.MND.704
Microfabrication, 5 cr
Tampere University
- Description
- Completion options
Teaching periods
Active in period 1 (1.8.2026–18.10.2026)
Active in period 2 (19.10.2026–31.12.2026)
Active in period 3 (1.1.2027–7.3.2027)
Active in period 4 (8.3.2027–31.5.2027)
Course code
BBT.MND.704Language of learning
English, FinnishAcademic years
2024–2025, 2025–2026, 2026–2027Level of study
Advanced studiesGrading scale
General scale, 0-5Persons responsible
Responsible teacher:
Jari VäliahoResponsible organisation
Faculty of Medicine and Health Technology 100 %
Coordinating organisation
MET Studies 100 %
Common learning outcomes
Innovation
Learning skills and critical thinking
Sustainable development goals
Goal 3: Good Health and Well-Being
Goal 9: Industry, Innovation and Infrastructure
Goal 12: Responsible Consumption and Production
Content
Core content
- Clean room working principles
- Lithography and resist working
- Surface and bulk microfabrication processes
- Etching
- Deposition methods
Complementary knowledge
- Wafer level working principles
- Defects and Yield
- Bonding
- Dicing
- Basic characterization of fabricated samples
Specialist knowledge
- Non contact lithography
- Oxidation
- Doping
Learning outcomes
Prerequisites
Compulsory prerequisites
Further information
Learning material
Equivalences
Studies that include this course
Completion option 1
Evaluation criteria: 0-5 grading based on laboratory work performance and lab report / learning diary and self evaluation
Participation in teaching
Blended teaching
24.08.2026 – 31.05.2027
Active in period 1 (1.8.2026–18.10.2026)
Active in period 2 (19.10.2026–31.12.2026)
Active in period 3 (1.1.2027–7.3.2027)
Active in period 4 (8.3.2027–31.5.2027)