Introduction to Microsystem Technology, 5 op

Core content

• Definition of microsystem technology, understanding of the potential and challenges related to microsystem technology, ability to name the main applications.
• Definition of scaling effect, its origin and main effects at microscale.
• Microscopy, especially optical microscopy, scanning electron microscopy and atomic force microscopy, basic operating principles.
• Skills to operate in the clean room facilities under supervision.
• Microactuators, especially piezoelectric actuators, shape memory alloy actuators, thermal actuators and electrostatic actuators, basic operating principles.
• Microsensors, especially pressure, acceleration and flow sensors. Structure and basic operation principles.

Complementary knowledge

• Basic understanding of dimensional analysis and and its utilization in microsystem technology.
• Comparing benefits and limitations of different microscopy methods.
• Profilometers in characterization.
• Comparing the implementation and performance of different actuator types.
• Comparing the implementation and performance of different sensor types.

Specialist knowledge

• Analyse and compare the differencies in scaling between different physical phenomena.
• Selection of microscopy technique according to the application.
• Other characterization methods.
• Material-related phenomena of microactuators. Microrobotics as an application field of microactuators.
• Sensor fabrication techniques.